ÃæÁÙйڷÎÑ×ÒßÇ飬£¬£¬£¬£¬£¬£¬£¬ÐÂÀû18¼¯ÍŽôÆÈÐж¯ÆðÀ´£ºÐÂÀû18¼¯ÍÅÆìÏÂÒ½ÁÆ»ú¹¹Åɳö131ÃûÒ½»¤Ö°Ô±³ÛÔ®ºþ±±¡¢ÐÂÀû18È¼ÆøÖ±½Ó¼ÓÈëÀ×ÉñɽҽԺ½¨Éè¡¢ÐÂÀû18Ò½Ò©ÏòÎ人µÈµØµÄ¶¨µãÒ½Ôº½ôÆÈÅäËÍÒ©Æ·¡£¡£¡£¡£¡£¡£Í¬Ê±ÐÂÀû18âù±¦¡¢ÐÂÀû18Íò¼Ò¡¢ÐÂÀû18ÖõصÈÒ²ÔÚ°ü¹ÜȺÖÚÉúÑÄÎï×ʹ©Ó¦·½ÃæÐ¢Ë³ÊµÁ¦¡£¡£¡£¡£¡£¡£
×÷Ϊ¿Æ´´°å°ëµ¼Ìå¾üÍÅÒ»Ô±¡°¸É½«¡±£¬£¬£¬£¬£¬£¬£¬£¬ÐÂÀû18΢µç×ÓµÚһʱ¼ä½¨ÉèÒßÇé·À¿ØÊÂÇéÏòµ¼Ð¡×飬£¬£¬£¬£¬£¬£¬£¬Æð¾¢¼ÓÈëµ½ÐÂÀû18¼¯ÍÅÈ«Ïß¿¹»÷ÒßÇéµÄÕ½¶·²½¶ÓÖÐÀ´¡£¡£¡£¡£¡£¡£Ïà¹ØÈËÊ¿Ïò֤ȯʱ±¨¼ÇÕßÌåÏÖ£¬£¬£¬£¬£¬£¬£¬£¬¹«Ë¾ÔÚ´º½Úʱ´úÈ«Á¦°ü¹Ü¿¹»÷ÒßÇéÏà¹ØÒÇÆ÷×°±¸ËùÐèоƬµÄ¶©µ¥¹©»õ£¬£¬£¬£¬£¬£¬£¬£¬Îª¿¹»÷ÒßÇéÌṩ¹ú²ú¡°´óÐÄÔࡱ¡£¡£¡£¡£¡£¡£
ÐÂÀû18΢µç×ӵġ°Öйúо¡±£¬£¬£¬£¬£¬£¬£¬£¬µÖ´ï¿¹Òß×îǰÏß
×÷ΪÖйúÁìÏȵÄÓµÓÐоƬÉè¼Æ¡¢¾§Ô²ÖÆÔì¡¢·â×°²âÊÔµÈÈ«¹¤ÒµÁ´Ò»Ì廯ı»®ÄÜÁ¦µÄ°ëµ¼ÌåÆóÒµ£¬£¬£¬£¬£¬£¬£¬£¬ÐÂÀû18΢µç×ÓÒÑÉú³¤³ÉΪÎÒ¹ú¹æÄ£×î´óµÄ¹¦Âʰ뵼ÌåÆóÒµ¡£¡£¡£¡£¡£¡£ÖµµÃ¹Ø×¢µÄÊÇ£¬£¬£¬£¬£¬£¬£¬£¬ÐÂÀû18΢µç×ӵIJ¿·ÖÖØµã¿Í»§µÄ²úÆ·£¬£¬£¬£¬£¬£¬£¬£¬ÒѾֱ½ÓÓÃÓÚÒßÇéÖÎÁÆÖеIJâÎÂÒÇ¡¢ºôÎü»úºÍÖÆÑõ»úµÈÒªº¦ÒÇÆ÷×°±¸¡£¡£¡£¡£¡£¡£¿£¿£¿£¿£¿£¿£¿¹»÷ÒßÇ飬£¬£¬£¬£¬£¬£¬£¬ÐÂÀû18΢µç×ÓÔðÎÞÅÔ´û£¬£¬£¬£¬£¬£¬£¬£¬¹«Ë¾È«Á¦°ü¹ÜÖØµã¿Í»§¾§Ô²¼°ÖÆÆ·¹©Ó¦£¬£¬£¬£¬£¬£¬£¬£¬ÔÚ´º½Úʱ´úÈ«Á¦°ü¹ÜÒßÇéÏà¹ØÒÇÆ÷×°±¸ËùÐèоƬ¶©µ¥¹©»õ£¬£¬£¬£¬£¬£¬£¬£¬½øÒ»²½Ëõ¶ÌÌá»õʱ¼ä£¬£¬£¬£¬£¬£¬£¬£¬Îª¿¹»÷ÒßÇéÕùÈ¡Á˸ü¶àÃû¹óʱ¼ä¡£¡£¡£¡£¡£¡£
²âÎÂÒÇ×÷Ϊ·À¿ØÒßÇéµÄ×îÖ÷ÒªÒ½ÁƼì²â×°±¸£¬£¬£¬£¬£¬£¬£¬£¬ÃæÁÙ×ÅÖØ´óµÄȱ¿Ú¡£¡£¡£¡£¡£¡£¾ÝÏàʶ£¬£¬£¬£¬£¬£¬£¬£¬ÔÚÒßÇ鱬·¢ºó£¬£¬£¬£¬£¬£¬£¬£¬×°ÔØÐÂÀû18΢µç×Ó´«¸ÐÆ÷оƬµÄÌåμì²âÒÇ£¬£¬£¬£¬£¬£¬£¬£¬¾ÍµÚһʱ¼äËÍ´ïÎ人µØÇøÒßÇé×îǰÏß¡£¡£¡£¡£¡£¡£
ÐÂÀû18΢µç×ÓÓÐÖØµã¿Í»§ÊǺ£ÄÚÕÆÎÕÈȵç¶ÑÌåμƴ«¸ÐÆ÷½¹µãоƬµÄÆóÒµ£¬£¬£¬£¬£¬£¬£¬£¬Æä´«¸ÐÆ÷оƬÒÑÖ±½ÓÓÃÓÚ·À¿Ø¿¹ÒßËùÐèÒªµÄÖÖÖÖÌåμì²âÒÇÆ÷ÖУ¬£¬£¬£¬£¬£¬£¬£¬Î人ǰÏßÏ൱һ²¿·ÖµÄÌåμƣ¬£¬£¬£¬£¬£¬£¬£¬¶¼Ê¹ÓÃÁ˿ͻ§¹©Ó¦µÄ½¹µã´«¸ÐÆ÷оƬ¡£¡£¡£¡£¡£¡£»£»£»£»£»£ÐÂÀû18΢µç×ÓÔÚÊÕµ½¿Í»§¹«Ë¾µÄ²âÎÂоƬ¼Ó¼±¶©µ¥ºó£¬£¬£¬£¬£¬£¬£¬£¬µÚһʱ¼äÏìÓ¦£¬£¬£¬£¬£¬£¬£¬£¬ÔÚ´º½Úʱ´úÆð¾¢µ÷Åä²úÄÜ£¬£¬£¬£¬£¬£¬£¬£¬È«Ïß°²ÅÅÌØ¼±ÅúÁ÷ͨ£¬£¬£¬£¬£¬£¬£¬£¬È«Á¦°ü¹Ü²âβúÆ·Ö§Ô®ÒßÇéµÚÒ»Ïß¡£¡£¡£¡£¡£¡£
Í»ÆÆÍâÑó¢¶Ï£¬£¬£¬£¬£¬£¬£¬£¬ÊµÏÖ½¹µãоƬµÄÈë¿ÚÌæ»»
ÔÚ¿Æ´´°å°ëµ¼Ìå¾üÍÅÖУ¬£¬£¬£¬£¬£¬£¬£¬ÐÂÀû18΢µç×ÓÓÐ×ÅÆæÒìµÄÓÅÊÆ£¬£¬£¬£¬£¬£¬£¬£¬¸Ã¹«Ë¾×ÔÖ÷Ñз¢µÄϵÁÐÖÇÄÜ´«¸ÐÆ÷½¹µãоƬ£¬£¬£¬£¬£¬£¬£¬£¬ÒÑÀÖ³ÉÍ»ÆÆÍâÑó¢¶Ï²¢ÊµÏÖÁ˲¿·Ö½¹µãоƬµÄÈë¿ÚÌæ»»¡£¡£¡£¡£¡£¡£
¾ÍÔÚ1ÔÂ10ÈÕ£¬£¬£¬£¬£¬£¬£¬£¬ÐÂÀû18΢µç×ÓÆìÏÂÐÂÀû18ÉÏ»ª¼ÓÈëµÄ¡°¸ßÐÔÄÜMEMSÆ÷¼þÉè¼ÆÓëÖÆÔìÒªº¦ÊÖÒÕ¼°Ó¦Óá±ÏîÄ¿»ñ¹ú¼Ò¿ÆÑ§ÊÖÒÕǰ½ø½±¶þµÈ½±¡£¡£¡£¡£¡£¡£ÏîĿЧ¹ûÕë¶ÔÖйú΢»úµçϵͳ£¨MEMS£©¹¤ÒµÁ´Òªº¦ÊÖÒÕÎÊÌ⣬£¬£¬£¬£¬£¬£¬£¬ÏµÍ³Ñо¿¿ª·¢ÁËMEMSÉè¼ÆÊÖÒÕÓëÉè¼Æ¹¤¾ß¡¢ÖÆÔ칤ÒÕºÍÔÚÏß¼ì²âÒÔ¼°¸ßÐÔÄÜѹÁ¦´«¸ÐÆ÷ÊÖÒÕ£¬£¬£¬£¬£¬£¬£¬£¬Íƶ¯ÁËÖйúMEMSÊÖÒյĹ¤Òµ»¯Éú³¤¡£¡£¡£¡£¡£¡£
¡°MEMSÓм«Ç¿µÄÓ¦ÓÃÉøÍ¸Á¦£¬£¬£¬£¬£¬£¬£¬£¬¿ÉÊÇÖйúµÄMEMS¹¤Òµ»¯Éú³¤½ÏÂý£¬£¬£¬£¬£¬£¬£¬£¬Éè¼ÆÓëÖÆÔì½¹µãÊÖÒÕ±»ÍâÑó¢¶Ï¡£¡£¡£¡£¡£¡£¡±ÐÂÀû18ÉÏ»ª¸±×Ü˾ÀíËÕΡÌåÏÖ£¬£¬£¬£¬£¬£¬£¬£¬¡°ÎÒÃÇÀÖ¼û¹«Ë¾ÔÚMEMSÁìÓò¸û×÷¶àÄêµÄЧ¹û£¬£¬£¬£¬£¬£¬£¬£¬Ò²ºÜÊÇÀÖÓÚ¼ÌÐøÐ¯ÊÖ¹¤ÒµÁ´Í¬°éΪʵÏÖMEMSµÄ¹ú²ú»¯¶øÆð¾¢¡£¡£¡£¡£¡£¡£ÏÖÔÚ£¬£¬£¬£¬£¬£¬£¬£¬¸Ã¹¤ÒÕÊÖÒÕÕýÒÀÍýÏëÓɳÉÊìµÄ6Ó¢´çÏò8Ó¢´ç×ªÒÆ£¬£¬£¬£¬£¬£¬£¬£¬ÆÚ´ýÄÜΪ¸ü¶àICÉè¼Æ¹«Ë¾ÌṩMEMS²úƷЧÀÍ¡£¡£¡£¡£¡£¡£¡±
¹ú¼Ò¹¤ÒµÐÅÏ¢»¯²¿°ì¹«ÌüÏ·¢µÄÎļþÏÔʾ£¬£¬£¬£¬£¬£¬£¬£¬ÐÂÀû18΢µç×ÓÆìÏÂÐÂÀû18ÉÏ»ªÈëΧ¡°ÐÂÒ»´úÈ˹¤ÖÇÄܹ¤ÒµÁ¢ÒìÖØµãʹÃü¡±½Ò°ñµ¥Î»¡ª¡ªÐÂÀû18΢µç×ÓÉ걨µÄÖÇÄÜ´«¸ÐÆ÷ÁìÓò½Ò°ñʹÃü£¬£¬£¬£¬£¬£¬£¬£¬ÆäÄ¿µÄÊÇʹÓÃÆäÓÅÒìµÄÊÖÒÕ»ù´¡¿ª·¢CMOS-MEMSÖÇÄܹâµç´«¸ÐÆ÷¼°¹æÄ£»£»£»£»£»£»¯¹¤ÒÕÖÆÔìÊÖÒÕ£¬£¬£¬£¬£¬£¬£¬£¬ÊµÏÖÐÂÐ͵¥Æ¬¼¯³É¹âµç´«¸ÐÆ÷ΪÖ÷Òª´ú±íµÄоƬÁ¿²ú£¬£¬£¬£¬£¬£¬£¬£¬ÎªÖÖÖÖÀàÐ͵ÄÐÂÐ͹âµç´«¸ÐÆ÷²úÆ·¹ú²ú»¯Ìṩ֧³Ö¡£¡£¡£¡£¡£¡£
¾ÝÏàʶ£¬£¬£¬£¬£¬£¬£¬£¬¹âµç´«¸ÐÆ÷²úÆ·Ö÷ÒªÓ¦ÓÃÓÚ°²·À¼à¿Ø¡¢Ò½ÁÆ¡¢Æû³µ¸¨Öú¼ÝÊ»ºÍ¹¤Òµ²âεÈÁìÓò£¬£¬£¬£¬£¬£¬£¬£¬½üÊ®ÄêÀ´Éú³¤Ñ¸ËÙ£¬£¬£¬£¬£¬£¬£¬£¬¾ßÓÐÓÅÒìµÄÊг¡Éú³¤Ô¶¾°¡£¡£¡£¡£¡£¡£»£»£»£»£»£ÐÂÀû18΢µç×Ó½«ÒÔ´ËΪÆõ»ú£¬£¬£¬£¬£¬£¬£¬£¬³ä·ÖʹÓÃMEMSÁìÓòÒµÒÑÐγɵľºÕùÓÅÊÆºÍÉîÖ¿µÄÊÖÒÕ»ýÀÛ£¬£¬£¬£¬£¬£¬£¬£¬Óë¿Í»§Ï¸ÃÜÏàÖú£¬£¬£¬£¬£¬£¬£¬£¬¼ÓËÙÊÖÒյĸüл»´ú£¬£¬£¬£¬£¬£¬£¬£¬Í»ÆÆ¸ü¸ßÊÖÒÕÖ¸±ê£¬£¬£¬£¬£¬£¬£¬£¬¾¡¿ìʵÏÖ¸ßÐÔÄÜÖÇÄܹâµç´«¸ÐÆ÷µÄ¹æÄ£Á¿²ú¡£¡£¡£¡£¡£¡£
2ÔÂ4ÈÕ-6ÈÕÏßÏ·ÑÝ£¬£¬£¬£¬£¬£¬£¬£¬A¹Éºì³ïµÚÒ»¹É½«½µÉú
ÐÂÀû18΢µç×ÓÕйÉÊéÏÔʾ£¬£¬£¬£¬£¬£¬£¬£¬8Ó¢´ç¸ß¶Ë´«¸ÐÆ÷ºÍ¹¦Âʰ뵼Ì彨ÉèÏîÄ¿ÊÇÖ÷ҪļͶÏîĿ֮һ£¬£¬£¬£¬£¬£¬£¬£¬¸ÃļͶÏîÄ¿½«ÓÐÀûÓÚÌáÉý¹«Ë¾µÄ²úÆ·ÖÆÔìÄÜÁ¦ºÍÊÖÒÕÁ¢ÒìÄÜÁ¦£¬£¬£¬£¬£¬£¬£¬£¬Ëæ×ÅÊг¡¹æÄ£µÄÀ©´óºÍÐÐÒµ¿Õ¼äµÄÔöÌí£¬£¬£¬£¬£¬£¬£¬£¬¹«Ë¾½«Í¨¹ý¹æÄ£ÓÅÊÆ¡¢ÖÆÔìÓÅÊÆºÍ²úÆ·ÓÅÊÆ£¬£¬£¬£¬£¬£¬£¬£¬½øÒ»²½Ìá¸ß¹«Ë¾½¹µã¾ºÕùÁ¦¡£¡£¡£¡£¡£¡£
ÐÂÀû18΢µç×ÓÒÑÓÚ1ÔÂ31ÈÕÆô¶¯Õйɣ¬£¬£¬£¬£¬£¬£¬£¬¹«Ë¾´Ë´Î¹ûÕæ¿¯Ðв»Áè¼Ý 2.93ÒÚ¹Éйɣ¬£¬£¬£¬£¬£¬£¬£¬¹ÉƱ¼ò³Æ¡°ÐÂÀû18΢¡±£¬£¬£¬£¬£¬£¬£¬£¬¹ÉƱ´úÂë¡°688396¡±¡£¡£¡£¡£¡£¡£¹«Ë¾½«ÔÚ2ÔÂ4ÈÕ-6ÈÕ¾ÙÐÐÏßÏ·ÑÝ£¬£¬£¬£¬£¬£¬£¬£¬Ëæ×ÅÐÂÀû18΢µç×ÓÉÏÊÐÀú³ÌµÄÍÆ½ø£¬£¬£¬£¬£¬£¬£¬£¬º£ÄÚA¹Éºì³ïµÚÒ»¹ÉÒ²½«½µÉú¡£¡£¡£¡£¡£¡£
×÷Ϊ¹ú²úоƬÖеÄÒ»Ãû¡°¸É½«¡±£¬£¬£¬£¬£¬£¬£¬£¬Éϰ¶¿Æ´´°åµÄÐÂÀû18΢µç×Ó½«¿ªÆôÐÂµÄÆªÕ£¬£¬£¬£¬£¬£¬£¬£¬ÎªÖйú¼¯³Éµç·ÊÂÒµ×ö³ö¸ü´óТ˳¡£¡£¡£¡£¡£¡£